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The semiconductor industry is witnessing a transformative shift as glass wafers, traditionally seen as a secondary option to silicon, gain prominence in advanced packaging and optical applications. With their unique properties, such as transparency and insulation capabilities, glass wafers are not only enhancing the efficiency of integrated circuits but also paving the way for innovations in augmented reality and LED manufacturing. As manufacturers adapt and refine processing techniques, the future looks bright for glass wafer technology.Glass wafers are increasingly utilizing CMP for their polishing processes,which need suitable polishing slurry.